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File:Self-aligned via patterning.png

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    Original file (990 × 309 pixels, file size: 16 KB, MIME type: image/png)

    Summary

    Description
    English: Self-aligned via patterning scheme. Left: Patterned unfilled trenches (blue). Center: Resist mask. Right: Vias patterned by etching through resist mask and hardmask (purple) surrounding trenches (blue).
    Date
    Source PowerPoint drawing
    Author Guiding light
    Other versions
    This diagram image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with {{vector version available|new image name}}.
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    Licensing

    Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
    GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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    Original upload log

    The original description page was here. All following user names refer to en.wikipedia.
    Date/Time Dimensions User Comment
    2015-08-26 11:04 994×309× (18501 bytes) Guiding light new label placement
    2015-08-26 11:02 994×313× (10987 bytes) Guiding light new label placement
    2015-08-26 11:01 994×313× (18535 bytes) Guiding light Corrected label of right picture
    2015-07-22 16:11 984×309× (18233 bytes) Guiding light fixed some glitches
    2015-07-22 15:37 984×309× (18248 bytes) Guiding light adjusted position of right oval
    2015-07-22 15:36 984×309× (18236 bytes) Guiding light slight modification of positions
    2015-07-22 14:43 984×309× (17810 bytes) Guiding light Different picture
    2015-07-22 12:53 1004×309× (15295 bytes) Guiding light Left figure caption change
    2015-07-22 12:50 1004×311× (15350 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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    depicts

    22 July 2015

    16,277 byte

    309 pixel

    990 pixel

    image/png

    a9d612a55f764d09e22ceb267000e5c48d77f122

    File history

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    (newest | oldest) View (newer 10 | ) (10 | 20 | 50 | 100 | 250 | 500)
    Date/TimeThumbnailDimensionsUserComment
    current16:35, 30 September 2018Thumbnail for version as of 16:35, 30 September 2018990 × 309 (16 KB)Guiding lightStraighten right edge of central figure
    16:33, 30 September 2018Thumbnail for version as of 16:33, 30 September 2018990 × 309 (16 KB)Guiding lightminor adjustment of bottom edge of central figure
    16:32, 30 September 2018Thumbnail for version as of 16:32, 30 September 2018990 × 309 (16 KB)Guiding lightChange from diagonal pair to horizontal pair
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016994 × 309 (18 KB)OgreBot(BOT): Reverting to most recent version before archival
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016994 × 313 (11 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-08-26 11:02:44 by Guiding light
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016994 × 313 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-08-26 11:01:35 by Guiding light
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 16:11:28 by Guiding light
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 15:37:34 by Guiding light
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 15:36:23 by Guiding light
    06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (17 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 14:43:12 by Guiding light
    (newest | oldest) View (newer 10 | ) (10 | 20 | 50 | 100 | 250 | 500)

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